cleanrooms

This paper reports an investigation into the ability of the air supply in non-unidirectional cleanrooms to aid recovery from episodes of airborne contamination, and minimise airborne contamination at important locations. The ISO 14644-3 (2005) recovery test, which measures the rate of decay of test particles, was assessed and a reinterpretation of the test results suggested. This allowed air change effectiveness indices to be calculated and used to evaluate the ventilation effectiveness of the cleanroom’s air supply.

The redispersion factor of microbe-carrying particles, which is the ratio of the concentration of floor-derived microbes in room air to those on a floor surface, was determined, as was the percentage of floor-derived microbes in room air. These relationships were shown to vary according to conditions in the room. Equations were derived that allow these relationships to be calculated for a variety of room conditions, including air supply rates, levels of personnel activity, and the effect of gravitational deposition on microbe-carrying particles.

The removal efficiency of high efficiency air filters against microbe-carrying particles (MCPs) in the air supply of occupied rooms, such as cleanrooms, was determined. Knowing the size distribution of MCPs in the air to be filtered, and the removal efficiency of a filter against individual particle diameters, the overall removal efficiency was ascertained.

Air supply volumes and velocities in cleanrooms are monitored by airflow measuring hoods and anemometers but these measuring methods can be inaccurate if used incorrectly. It is demonstrated in this article that measuring hoods are accurate if the air supply passes evenly out of the hood, as occurs when the air volume is measured from a four-way diffuser or no air supply diffuser. However, when a swirl diffuser was investigated, the measuring hood gave readings more than 50% greater than the true volume. The reasons for the inaccuracy, and methods to correct it were established.