Experimental and numerical results for airflow and particle transport in a microelectronics clean room.

airbase_5655... [6494Kb]
Kuehn T H, Pui D Y H, Gratzek J P
air flow, air velocity, cleanroom, turbulent air flow, particle
Year:
1992
Bibliographic info:
USA, Ashrae, Transactions, Vol 98, Part 1, 1992

            

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