Study on simulation of airflow within the enclosure in the semiconductor factory cleanroom

Ma R.H.
Year:
2006
Bibliographic info:
Aerosol science and technology, Vol 40, n° 4, April 2006, pp 282-292

The aim of that paper is the analysis of the airflow field and pressure distribution of standard mechanical interface (SMIF) enclosure in the semiconductor factory cleanroom on the one hand and the investigation of the air cleanliness inside the mini-environment. Results and conclusions are presented.

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