Improvement in contamination control for a LCD color filter coater was studied by using a mini-environmental design. Different operating conditions of the door and the exhaust of the mini-environment were studied. Measurements of particle concentration flow field, and VOC concentration were performed. Both the particle contamination to the coating process and the VOC contamination to the outside cleanroom environment were considered in this study. lt was found that a minienvironment could be designed to significantly reduce the particle concentration.
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