The purpose of this study is to develop an optical measurement method of particles on a flat surfacefor evaluating particle removal performance of air-jet by nozzles in the cleanroom. Glass beads areselected for the test aerosol and they are adhered on test surfaces of Si wafer as witness plate.Authors developed new optical measuring system using Ar laser and surface particles are measuredby the system and also a surface particle counter for Si wafer. The experimental survey is conductedfor 14 types of nozzles and 30 different conditions.
Login