OPTICAL MEASUREMENTS OF SURFACE PARTICLES FOR EVALUATING REMOVAL PERFORMANCE OF AIR-JET

Hong, M.T.; Tanaka, T.; Changhyun, Y.; Hirano, S.; Fujii, S.; Watanabe, K.
Optical measurement, Removal performance, Surface particle, Air-jet nozzle, Flat panel display
Year:
2007
Bibliographic info:
The 6th International Conference on Indoor Air Quality, Ventilation & Energy Conservation in Buildings IAQVEC 2007, Oct. 28 - 31 2007, Sendai, Japan

The purpose of this study is to develop an optical measurement method of particles on a flat surfacefor evaluating particle removal performance of air-jet by nozzles in the cleanroom. Glass beads areselected for the test aerosol and they are adhered on test surfaces of Si wafer as witness plate.Authors developed new optical measuring system using Ar laser and surface particles are measuredby the system and also a surface particle counter for Si wafer. The experimental survey is conductedfor 14 types of nozzles and 30 different conditions. In this paper, standard nozzle and 3 better nozzlesare selected to be reported. As the results, (1) the new measuring system can detect particles with0.5 micro meters and larger range, (2) removal performances are estimated by size distribution andparticles larger than 3.5 micro meters are removed over 90% by air-jet of the test nozzles.

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