Deaves D M, Khan Z A
Year:
1984
Bibliographic info:
Conference on the Integrated Circuit Factory Design for the 1980s, Stratford-on-Avon, 30-31 January 1984. 22p. 14 figs, 3 refs.

This paper describes the development of a computational air flow modelling technique, and identifies applications within clean room installations. Details are given of a validation exercise in which air flow patterns and velocities for a number of simple 2-dimensional configurations were both measured and predicted. The good agreement between measurements and predictions clearly demonstrates the usefulness of the method.