This paper describes the development of a computational air flow modelling technique, and identifies applications within clean room installations. Details are given of a validation exercise in which air flow patterns and velocities for a number of simple 2-dimensional configurations were both measured and predicted. The good agreement between measurements and predictions clearly demonstrates the usefulness of the method.
CAD for air flow optimisation in clean room installations and other controlled environments.
Year:
1984
Bibliographic info:
Conference on the Integrated Circuit Factory Design for the 1980s, Stratford-on-Avon, 30-31 January 1984. 22p. 14 figs, 3 refs.