The R&D of low noise fan filter units and a numerical study of their applications in cleanroom air distribution.
Year:
2000
Bibliographic info:
in: "Progress in Modern Ventilation", Proceedings of Ventilation 2000, Volume 1, proceedings of the 6th International Symposium on Ventilation for Contaminant Control, held Helsinki, Finland, 4-7 June 2000, Finnish Institute of Occupational Health